Thin Film Physics Department



KFKI Campus Building 26 
+36 1 392 2587
+36 1 392 2226
Dr. Béla PÉCZ

Their traditional field is the study of structure evolution in polycrystalline layers. They constructed models, which are planned to use in the field of materials with low friction, hard coatings and magnetic layers. Moreover semiconductor layers, heterostructures and contacts to semiconductors are among their important research areas. Their third working field is the ion-solid interaction, ion mixing in layers and at interfaces. In July 2013 the ceramics group joined the Thin Film Physics Department. The research subject of ceramics fits very well to the research of modern functional materials, layers and interfaces on which the Thin Film Physics Department is working back for ages. A novel research field is the ceramics and the development of biocompatible implants.
Results in 2013:
 They explained the formation of <111> texture in TiN layers instead of the common <001> texture and correlated that with the high oxygen content (> 15 at%). of the layers. Their XPS and TEM investigations showed that the <111> oriented crystallites are covered by a two dimensional TiO2 phase, while ont eh surface of the <001> crystallites the most of the oxygen atoms are dissolved in the TiN lattice.
 Developing self-organised diffusion barrier layers they could identify the structural zone diagram of Cu-Mn. They measured the electrical parameters and mechanical behaviour of the identified phases. Finally they could show a barrier layer on the substrate in amorphous layers with 40-70 at% Mn content.
 In the frame of a development of bioinert implants they prepared titan-carbon thin layers grown in argon and nitrogen ambient. The TiC/amorphous C layers grown at 200oC is composed of a few nm large, cubic TiC crystallites embedded in amorphous carbon matrix, while the layer sputtered in nitrogen is amorphous containing however, vary small (about 2 nm) TiCN crystallites, which can be seen in high resolution. They have shown, that the nanostructured HAp (hydroxyapatite) prepared from egg-shells is dissolved easily in vivo therefore is one of the most promising material for bone regeneration and replacement.
 They proved that the addition of Mo to Al91Mn6Fe2Mo1 ribbons increased the stability of the quasicrystalline phase. They also prepared sintered Al-Al2O3 nanocomposites. Using pure Al additives they could get very compact sintered probes.
 In the field of nanometer size structured magnetic recording media teh y prepared aluminium-oxide layers, which they nanostructured by pulse excimer laser. The surface was coated by a Langmuir-Blodgett film and those nanospheres focused the laser light to the target. The method results in a regularly arranged nano-pit network.
 They prepared Ag-Au bimetal catalyst on SiO2 substrate. The activity of that was increased by the growing silver content (to the 50%) compare to the Au/SiO2 reference sample.
 They developed a new tool for the preparation of combinatorical thin films, which is planned to be patented.
 They have shown, that nitridation of the single crystalline diamond surface hinders the formation of inversion domains and substantially improves the quality of the grown GaN layer. HRTEM investigations and optimization of deposition parameters resulted in graphene on nickel in which large area (~20 µm in diameter) contain only a single layer of graphene.
 A graphene layer placed on a substrate suffers substantial geometrical distortions, which lead to corrugation and to the appearance of Moiré superlattices. They made atomistic level computer simulation, which proved, that the observed periodicity of 1.5 nm belongs to teh rotation angle of 10o.
 They proved in their in situ annealing experiments, that nickel-silicide is formed already at 250oC at the interface of amorphous Si/nickel, moreover this silicide decreases the crystallization of the amorphous silicon.
 In the Auger laboratory they also take XPS spectra investigating the chemical bonds. The used successfully the REELS (reflection electron energy loss spectroscopy) technique for the detection of nano-particles.
 They could prepare a 5-20 nm thick layer rich in SiC which behaves like a resist layer in Si etching by ion mixing of C/Si layers.
 They developed a new software tool for the investigation of grain boundaries in HRTEM, which helps the selection of neighbouring grains in a polycrystalline layer. IN this way grain which can be tilted to a position int he TEM in which both grains can be image din high resolution are pre-selected.

Last modified: 13th May, 2014.