Thin Film Physics Department


KFKI Campus Building 26 
+36 1 392 2249
+36 1 392 2226 
Dr. Katalin BALÁZSI

The department carries out research in the field of thin films and ceramics. Based on their multi decade experience they investigate the microstructure of polycrystalline layers, novel nanocomposite materials and semiconductor layers. The above subjects were expanded to the field of modern ceramics, bioceramics and nanocystalline ceramic doped austenite steel composites prepared by powder metallurgy.
The Department is strong at national and even international level at transmission electron microscopy (TEM), what they use in order to determine relationships between the microstructure and other physical properties. They also conduct development of special methods based on electron diffraction.
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  • The main goal of JST-V4 project is the development of GaN based layered metal-oxide-semiconductor (MOS) for realization of normally-off switched devices and decreasing conversion losses in electronics. The structure of very thin gate dielectric Al2O3 layers prepared by ALD (Atomic Layer Deposition) onto standard GaN/AlGaN/GaN heterostructures serving as substrates was studied. The Al2O3 structure showed the amorphous character.
  • In the FLAG-ERA project, ZnO was produced by ALD. The layers were grown onto 2 - 3 graphene/4H SiC templates. The first experiments were also carried out in order to grow 2D layers by intercalation between the above template layers. They have shown the parameter range in which the graphene is stable on SiC and also pointed out the relation between the quality of the grown layers and growth parameters.
  • In the MTA Postdoctoral project and CNR-MTA bilateral project, Ni/Au Schottky contact grown on bulk GaN was studied. Their results could give an explanation on the instability of the Schottky barrier what was revealed by I-V measurements.
  • The aim of M-ERANET project was the development of nanocomposite ceramics (Si3N4, SiC) with various graphene additions. The main goal of the research was the preparation of ceramic-graphene composites for tribological application in aqueous environments. Improved tribological properties, more stable frictional behaviour and a significant increase of the wear resistance have been obtained in the composites with 5-10 wt% graphene prepared by attritor milling and hot pressing.
  • The EU FP7 „HypOrth” project was focusing on the development of bioactive coating applied to commercial implants for increasing the osteointegration and decreasing of allergic reaction after surgical implantation. The starting materials for biocoatings were eggshell and seashell. The powder technology, namely attritor milling was used for nanosized biopowder preparation. The coating was deposited onto the surface of the implant by wet suspension electrospraying method.
  • The micro-combinatorical method was developed for effective study of the concentration dependent properties of two component thin layer systems. This method allows the study and testing of a linearly variable composition deposited on the single 3 mm sized TEM grid. This patent can be used not only for TEM study, but for Ellipsometry, Auger Spectroscopy, Nanoindentation as well.
  • C/Si multilayer structures have been irradiated at room temperature by Ar+ and Xe+, which resulted in the formation of SiC rich phase at the interface. This phase has been studied by AES depth profiling and potentiodynamic electrochemical test. A correlation between the amount of SiC rich phase and the chemical resistance could be established by introducing a new quantity the effective area density. Thus, tailoring the chemical resistivity of the mixed layer is possible by choosing proper irradiation parameters and/or layer structure.