Thin Film Physics Department – TEM & HREM Laboratory

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Thin Film Physics Department – TEM & HREM Laboratory

Analytical and high resolution transmission electron microscopes and EDS analysis

MFA, KFKI Campus, Building 26.
Contact: Levente Illés, illes.levente @

Philips CM20 TEM : Analytical TEM with side entry goniometer, working at 200 kV
(installed in 1990)

  • 0.27 nm point to point resolution
  • Versatile range of imaging and diffraction techniques available (SAED, microdiffraction, CBED)
  • Nanoprobe X-ray microanalysis (EDS) with NORAN Voyager analyser (Z = 5 – 92)
  • Special in situ investigations in heating/cooling holders
  • On-line measurements of images and diffraction patterns
  • User friendly computer control for easy change of modes of operation.
  • Image intensified CCD-camera and monitor system for quick alignment
Specimen holders available for the Philips CM20 microscope :

  • Single tilt holder (Philips), X-tilt range: ±45°
  • Rotation holder (Philips), X-tilt: ±45°, rotation: 360°
  • Double tilt analytical holder (GATAN), made of low background Be, with X- tilt of ±45° and Y-tilt of ±30°
  • Double tilt, analytical, cooling holder (GATAN), same as above but can also be used with liquid nitrogen cooling to reduce specimen contamination
  • Heating holder (Philips), with controlled temperature (up to 1000°C)
Atomic resolution TEM with side entry goniometer working at 300 kV
(installed in 2001)

  • 0.17 nm point-to-point resolution achieved by UHR pole piece, high stability electronics and vibration-free base
  • Side entry goniometer allowing specimen-tilt up to 20 degree (X, Y)
  • Single-tilt and double tilt sample holders (JEOL), as well as LN2 cooled double-tilt holder (GATAN)
  • EELS analysis and energy filtered imaging with post-column imaging filter (GATAN GIF Tridiem, installed in October 2005)
  • Options of image recording: photographic film, imaging plate or slow-scan CCD camera (part of the GIF system)