Microtechnology

Department of Microtechnology & Semiconductor Characterisation

Head: Gábor Battistig
Location: KFKI Campus, Building 29/A-B & 18/D
Contacts: dragon@mfa.kfki.hu, +36-1-392-2616
More information: www.mems.hu

Mission:

The main task of the Microtechnology Department is the research, development and system integration of physical, chemical/biochemical sensors and systems:

• MEMS and MEMS related technologies, with special emphasis on development of Si MOS embedding circuits;
• Development and functional testing of different MEMS gas, chemical, 3D force, thermal, biology related sensors and sensor systems;
• Development of microfluidic systems;
• Development and applications of near IR light emitting diodes and detectors;
• Development of solar cells and their competitive technology.

Fundamental research on:

• Sensing principles;
• Novel materials and nanostructures;
• Novel 3D fabrication techniques;
• Ion-solid interaction for supporting MEMS development.

Device and material characterizations widely used in our projects:

• Ion beam analysis methods;
• IR and Raman scattering;
• Scanning Microprobes;
• Optical and Electron Microscopy, SEM, TEM, EDX;
• Spectroscopic Ellipsometry;
• Electrical characterisations.

The Microtechnology Department of MFA runs the 300 sqm clean lab (Class 100 - 1000) with the complete Si-CMOS technology together with a mask shop, unique in Hungary. A rather new and developing large facility of the Department is the CIGS solar cell technology laboratory equipped with a pilot line of sputtering, evaporation and laser scribing modules for 30×30 cm² glass substrates.

List of main facilities