Department of Microtechnology

Head: Gábor Battistig
Location: KFKI Campus, Building 29/A-B & 18/D
Contacts: dragon@mfa.kfki.hu, +36-1-392-2616

More information: www.mems.hu

Main task of the department is multidisciplinary sensor research, the manufacturing of functional nano/microsensors based upon novel sensing principles, the elaboration of the related processing, the integration and validation of sensor systems. The research is carried out in clean-room processing environment, in assembly, measurement (optical, electrical) and testing laboratories including characterization facilities.

  • In the frame of an FP7 European project (PiezoMAT), which closed in 2017 the integration of piezoelectric ZnO single crystal wires based sensor elements was realised in form of functional sensor blocks. The acquisition and recording of high resolution ( > 1000 DPI ) 3D pattern of the fingerprints was demonstrated, and the developed sensor system successfully validated. The project accomplished the targeted objectives and was evaluated by the EC as „outstanding achievement”.
  • The project ENIAC INCITE targeted Minimal Invasive Surgery, where as part of an international consortium, they worked on the development of an adequate robotic system. The main achievement of the project closing in 2017 was the integration of the 3D force-sensors into a laparoscope and the control-system for automatic handling of the tool by the surgeon. The characterisation of the devices for the appropriate function was completed, the flexibility of different tissues was checked and the tactile information for the operating surgeon was calibrated. The adaptation of this original development of the department, the piezoresistive force-sensor largely improved the safety of laparoscopic operations.
  • The control of wetting properties of the inner walls of polymer microfluidic channels and thereby the directed local modification of their hydrodynamic properties was solved with the collaboration of industrial partners in Lab-on-a-chip systems. This facilitates the fabrication of complex microfluidic chips, which solves the transport of analytic fluids without the need for any external pressure, just by the appropriate use of capillary effect. Built upon the results achieved so far, they obtained a grant of a VEKOP project together with the industrial partner for the development of a complex measurement system using rapid analysis of samples in the detection of urinary bacterial infections.
  • In the domestic funded project started in 2017 their task is the development of sensor-nodes, which can sense certain quantities, carry out the pre-processing and the short-range wireless transfer of the obtained data in an autonomous fashion. Powering of the units is planned by the utilisation of the harvestable (vibration, light, thermal) energy from the environment. The first bread-board models have shown encouraging results, the application of such systems in the industry, agriculture and smart-city environment is most promising.

More info: http://www.mems.hu/