Department of Microtechnology & Semiconductor Characterisation
The main task of the Microtechnology Department is the research, development and system integration of physical, chemical/biochemical sensors and systems:
- MEMS and MEMS related technologies, with special emphasis on development of Si MOS embedding circuits;
- Development and functional testing of different MEMS gas, chemical, 3D force, thermal, biology related sensors and sensor systems;
- Development of microfluidic systems;
- Development and applications of near IR light emitting diodes and detectors;
- Development of solar cells and their competitive technology.
Fundamental research on:
- Sensing principles;
- Novel materials and nanostructures;
- Novel 3D fabrication techniques;
- Ion-solid interaction for supporting MEMS development.
Device and material characterizations widely used in our projects:
- Ion beam analysis methods;
- IR and Raman scattering;
- Scanning Microprobes;
- Optical and Electron Microscopy, SEM, TEM, EDX;
- Spectroscopic Ellipsometry;
- Electrical characterisations.
The Microtechnology Department of MFA runs the 300 sqm clean lab (Class 100 - 1000) with the complete Si-CMOS technology together with a mask shop, unique in Hungary. A rather new and developing large facility of the Department is the CIGS solar cell technology laboratory equipped with a pilot line of sputtering, evaporation and laser scribing modules for 30×30 cm2 glass substrates.