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Microsystems Laboratory

Head of Laboratory: Dr. Péter Fürjes

website: biomems.hu, mems.hu

The Microsystems Laboratory is intended to develop, fabrication and integration of micro and nanosystems, sensor structures whom application can open new perspectives in the field of medical diagnostics, Minimal Invasive Surgery techniques, energy efficient autonomous systems (sensor arrays, autonomous driving). Besides these topics the research activities extended to the directions of optical applications (spectroscopy), environment monitoring (water analysis) and security (gas sensing). Their results in 2019:

  • MEMS / smart sensors: The applicability of the bulk silicon micromachined calorimetric gas detectors elements in cheap and low power consumption sensors was proved. The goal of the actual research is to demonstrate prototypes of such gas sensors which fulfil the strict commercial requirements regarding their sensitivity, stability and lifetime. The morphological/architectural aspects of the micro hotplates were analysed and the key elements of their degradation were revealed in cooperation with experts of Moscow National Nuclear Research University. Based on the results outstanding surface temperature homogeneity was achieved (±5°C) what is crucial for the proposed gas sensing functionality.
  • BioMEMS, medical applications: Special catheter integrated tactile detector was developed in the frame of „POSITION-II” ECSEL project applying technologies compatible with „FLEX to RIGID – F2R platform of the Philips. The first demonstrator devices were fabricated and tested. According to the results of functional analysis the final structure and fabrication technology of the capacitive sensors were defined. In the project special materials, material combinations and thin and thick film deposition technologies were characterised to determine their applicability as biocompatible protective layers for electronic components and systems during implantation in human body.
  • The Laboratory contributed to the development of an implantable microelectrode array, which is able to change its Youngs-modulus from 2 GPa to 300 MPa if being exposed to physiological temperature. Besides the micromachining of the tiolene-acrylate based micro device, packaging of the system was optimized to meet the demands of long-term operation in the living body.
  • The Laboratory contributed to the in vitro and in vivo demonstration of a multimodal implantable actuator, which comprises of monolithically integrated infrared waveguide, a temperature sensor and electrophysiological recording sites. Depending on the targeted brain region and cell type, the controlled elevation of background temperature resulted in reversible excitation or inhibition of cellular activity.
  • Lab-on-a-Chip / Organ-on-a-Chip applications: In the cooperation with 77 Elektronika Ltd. dedicated microfluidic systems are continuously developed and improved to be applicable for autonomous transport of blood samples in Lab-on-a-Chip based devices. These systems are to be applied for detection cardiovascular marker proteins for Point-of-Care diagnostics after adequate bio-functionalization. In cooperation with the company and the University of Pécs special microfluidic cartridges and their long term surface modification techniques are being planned, developed, manufactured and tested. The goal of the project is to improve the effectivity of the human in-vitro fertilisation.
  • In cooperation with the 77E Ltd. adequate microfluidic systems were defined to be applicable in urine analyser POC diagnostic device for solving the dedicated subtasks of sample-preparation. The research was focused on the definition of microfluidic structures applicable for filtering and lateral positioning cells and particles by passive hydrodynamic phenomena. Accordingly special high throughput microfluidic filters for capturing and selecting elements having different diameters were developed, fabricated and characterised. The lateral focusing of filtered cells over the sensing region of the microfluidic systems were also tested. The first versions of the proposed microfluidic cartridges were designed and manufactured for application in the optical setup for testing with real sample solution (bacteria suspension).
  • SERS (Surface-Enhanced Raman Spectroscopy): Specific SERS substrates were developed (in cooperation with Wigner Physical Research Centre and Aedus Space Ltd.), fabricated by micromachining technologies and tested, which could be integrated into microfluidic systems for small volume sampling. The structure, morphology and performance (Raman amplification) of the SERS substrates were analysed intensively.
  • Infrared LED development: In opposition to traditional compound semiconductor LED-matrix solutions containing multiple discrete devices, a novel LED structure have been developed where multiple wavelengths are emitted from one active layer. The wide-band emitting LED sources contain 1 to 3 additional photoluminescent converting layers on top of the primary active emitting layer. Preparation, characterisation and fine tuning of the layer structures take place parallel to the manufacturing of the standard LEDs for sale. A highly selective spectroscopy sensor is in development which contains a special double-wavelength LED chip and two selective photodiodes, both developed by the Laboratory and capable of measuring the concentration of solutions e.g. ethanol-water.
  • Technology and FEM/Multiphysical modelling: Optimization of the design variants and behaviour of microfluidic systems connected to different project (Lab-on-a-Chip, POC diagnostics) is crucial. The cross-sectional flow rate or concentration profiles of solutions and distributions of particle or cells flowing in them were analysed according to the targeted analytical or diagnostic function. Their morphology and surface properties (e.g. hydrophilicity) were also considered in complex simulations at high finite-element density. Proper prototyping, manufacturing-ready technologies are achieved after further simulations which also provide feedback for the interpretation of the experimental microscopic behaviour of realized devices with respect to their designed/proposed/required properties.