A new oxidation furnace has been put in operation in the MEMS Laboratory
of the Centre for Energy Research, a member of the Eötvös Lóránd Research
Network. Financed by the European Union, the investment is a major step in the
upgrade of the existing Si processing line, thereby facilitating both the
R&D activities and higher education training in the field of sensor
development and related material research.
The four tube system is set for dry and wet oxidation as well as for
medium and high temperature annealing processes needed in Si based MEMS
fabrication. The new is
essential for the competitive R&D activity. This is well indicated by the
ongoing international projects of the laboratory H2020 ECSEL „A pilot line for the next generation of smart
catheters and implants (POSITIONII)” and “Enabling Moore for Medical
(Moore4Med)” projects as well as by the Russian-Hungarian bilateral sensor
development entitled “Low power consumption-type nanosensors for gas
detecting in harsh environment”.
Besides the international activity, the research group of the Laboratory
is highly committed to support the domestic industrial needs and higher
education by hosting BSc and MSc students and offering PhD research topics.
value of total 227M HUF was jointly granted by the European Union and the
Hungarian Government from the European Structural and Investment Funds, via the
Competitive Central-Hungary Operative Programme – Strategic R&D centres.